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Will Google's New SEO Algorithm Impact My SEO Efforts?. Google Account Manager 8.9 GAM Download APK.1. Field of the Invention
The present invention relates to a semiconductor integrated circuit, a semiconductor device, and a method of manufacturing a semiconductor device.
2. Description of the Related Art
In recent years, as a storage device in a semiconductor integrated circuit, a semiconductor memory device using an MFS (Metal-Ferroelectric-Semiconductor) ferroelectric capacitor has been developed, and the MFS ferroelectric memory using a ferroelectric capacitor has been adopted in a nonvolatile memory such as a FeRAM (Ferroelectric Random Access Memory).
A ferroelectric capacitor is used in an SRAM and a DRAM, and is also used in a ferroelectric memory. The ferroelectric memory is roughly classified into a nonvolatile memory and a volatile memory, and the nonvolatile memory is mainly used for an application requiring a high-speed operation, such as a high-speed SRAM.
FIG. 2 shows a cross-sectional structure of a ferroelectric memory cell in a conventional semiconductor memory device. A reference symbol “F” shows a ferroelectric capacitor, “FE1” shows a first electrode, “BE1” shows a first base interconnect, “BE2” shows a second base interconnect, “BE3” shows a third base interconnect, and “W” shows a word line. In the ferroelectric memory, for example, the ferroelectric capacitor F and the word line W are connected in series, and an access transistor in a complementary circuit is formed in the area sandwiched by the ferroelectric capacitor F and the word line W. The first electrode FE1 of the ferroelectric capacitor F is connected to one end of the series circuit, and the other end of the series circuit is connected to a bit line BL1 through the access transistor.
The gate of the access transistor is connected to the word line W, 0b46394aab
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